nir-vana innovation network

A Dutch spin-off SME develops and sells machines, materials and processes for nanoimprint solutions. The SME is specialized in ‘Substrate Conformal Imprinting Lithography’ (SCIL). SCIL is a cost effective, robust, high yield process enabling nanometre resolution on a large variety of substrates. Satisfying the rapidly increasing demand for products with nano imprinted components, SCIL delivers proven, high quality imprints on large areas up to 300 millimetres. It can be used to make nano and micro patterns with feature sizes down to less than 10 nanometres. And because of the unique properties of the used imprint sol-gel material resist that is applied by capillary action, SCIL saves time by directly producing a hard-etch mask or functional layer. Unlike conventional lithography processes, SCIL has fewer defects. Compared to other imprint lithography processes SCIL causes less damage to the materials thanks to its soft conformal stamp. Patterns are imprinted over particle contaminants and distortions are dissipated in the soft rubber layer. Improving yield, this results in lower operation costs and high quality output of the produced products on the wafers. Single layer nano-patterning is a key process step for a multitude of applications. Nanoimprint lithography solutions can be used to create functional structures at nano scale enabling manufacturers of light emitting diodes substrates, lasers, micro optical devices, (bio)sensors, solar cells, display covers, micro electromechanical systems (MEMS), photonic crystals and many other products to increase performance and reduce costs. The Dutch SME is interested in commercial agreements with technical assistance with manufacturers of wafer based products with nano (and micro) patterns. To come to the wafer based products the Dutch SME will support the manufacturer with in-house wafer production with: - R&D and process development - Tooling and processes for small series and high volume production - Mature supply chain of sol-gel resist materials - Dedicated processes for their requirements. The partner is desired to produce the wafer based products and/or to be active in the value chain from engineering to sales of concerning wafer based products.